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平面研磨機鏡面加工技術

　　對于研磨(mo)機來說，主要(yao)是在維持研磨(mo)所取(qu)得(de)良好(hao)的(de)平面(mian)(mian)度(du)前提下(xia)，去除工(gong)件表面(mian)(mian)微(wei)小的(de)凸(tu)起和表面(mian)(mian)損傷層，以(yi)獲得(de)鏡(jing)面(mian)(mian)光度(du)。所以(yi)要(yao)求均與、無方向(xiang)性地拋光整個工(gong)件表面(mian)(mian)。反映在速度(du)上，就是工(gong)件表面(mian)(mian)上每(mei)一點(dian)的(de)相對速度(du)大小應在任何時候(hou)都保持恒定。

　　平面(mian)(mian)研磨機鏡(jing)面(mian)(mian)加工技(ji)(ji)術(shu)是一門新(xin)興的(de)綜合性(xing)加工技(ji)(ji)術(shu)，它集成(cheng)了現代(dai)機械(xie)、光(guang)學(xue)、電(dian)子計算機、測(ce)量及(ji)(ji)材(cai)料等(deng)先進技(ji)(ji)術(shu)成(cheng)就，已成(cheng)為國家科學(xue)技(ji)(ji)術(shu)發(fa)展水(shui)平的(de)重要標志。隨著各種新(xin)型功能陶(tao)瓷材(cai)料的(de)不(bu)斷(duan)研制(zhi)成(cheng)功，以及(ji)(ji)這些(xie)材(cai)料在(zai)各種高(gao)(gao)性(xing)能電(dian)子元器(qi)件(jian)、光(guang)學(xue)、信息系統等(deng)領(ling)域的(de)廣(guang)泛(fan)應(ying)用，要求元件(jian)和零件(jian)的(de)加工精度(du)越來越高(gao)(gao)，有的(de)甚(shen)至要求達到納米級(ji)或更高(gao)(gao)的(de)加工精度(du)以及(ji)(ji)無損傷的(de)表面(mian)(mian)加工質(zhi)量。

　　工(gong)(gong)(gong)件(jian)是不變(bian)形(xing)(xing)(xing)的(de)剛體，拋(pao)(pao)(pao)光(guang)盤是能(neng)(neng)按工(gong)(gong)(gong)件(jian)加(jia)工(gong)(gong)(gong)面(mian)(mian)形(xing)(xing)(xing)狀變(bian)形(xing)(xing)(xing)的(de)彈(dan)性體。這時可(ke)以忽略介于兩者之間(jian)的(de)磨(mo)粒與(yu)加(jia)工(gong)(gong)(gong)液的(de)厚度和形(xing)(xing)(xing)狀變(bian)化，認為(wei)工(gong)(gong)(gong)件(jian)與(yu)拋(pao)(pao)(pao)光(guang)盤間(jian)貼緊;當(dang)工(gong)(gong)(gong)件(jian)尺寸大(da)于拋(pao)(pao)(pao)光(guang)盤半(ban)徑(jing)，或(huo)(huo)偏(pian)心距過大(da)時，工(gong)(gong)(gong)件(jian)會露出拋(pao)(pao)(pao)光(guang)盤，既有一部分表(biao)面(mian)(mian)不能(neng)(neng)與(yu)拋(pao)(pao)(pao)光(guang)盤始終接觸;當(dang)研磨(mo)或(huo)(huo)拋(pao)(pao)(pao)光(guang)過程中(zhong)，工(gong)(gong)(gong)件(jian)材料平行度誤(wu)差超出允許范圍時就需(xu)要對其(qi)平行度進行修正(zheng)。 在平面(mian)(mian)拋(pao)(pao)(pao)光(guang)機的(de)鏡面(mian)(mian)拋(pao)(pao)(pao)光(guang)加(jia)工(gong)(gong)(gong)工(gong)(gong)(gong)序中(zhong)，可(ke)以認為(wei)工(gong)(gong)(gong)件(jian)的(de)去(qu)除量(liang)主要是由磨(mo)削(xue)路徑(jing)的(de)長度決定的(de)，因此直(zhi)接控(kong)制(zhi)工(gong)(gong)(gong)件(jian)表(biao)面(mian)(mian)的(de)磨(mo)削(xue)路徑(jing)長度能(neng)(neng)夠更(geng)加(jia)精確控(kong)制(zhi)工(gong)(gong)(gong)件(jian)的(de)去(qu)除量(liang)。